Pyrophoric gas neutralization chamber

ABSTRACT

A pyrophoric gas neutralization chamber is disclosed. The chamber can be used to neutralize a stream of spent process gas from, for example, a chemical vapor deposition process containing, for example, silane. The disclosed chamber is a multi-tiered structure which provides a turbulent flow of air and gas which provides for a controlled neutralization reaction. The chamber operates over a wide range of incoming pyrophoric gas flows to neutralize virtually all of the pyrophoric gas, such that the risk of explosion is eliminated. Finally, the disclosed chamber is inactive in that no fuel source, ignitors, or flame is required. The turbulence in the air/gas flow causes the pyrophoric gas to react with the air without an induced flame.

BACKGROUND OF THE INVENTION

1. Field Of The Invention

The present invention relates to a method and apparatus for neutralizingpyrophoric gases. The invention can be used to neutralize, for example,pyrophoric gases used in the manufacture of semiconductor devices.

2. Prior Art

Many industries use pyrophoric gases for a variety of processes andoperations. In the semiconductor industry, a variety of pyrophoric gasesare used during the manufacture of semiconductor devices. These gasesare termed pyrophoric due to their ability to ignite spontaneously uponcontact with an oxidant such as oxygen. Thus, these gases may igniteupon contact with air, and if a pocket of pyrophoric gas contacts air,an explosion may result. The possibility of explosion is increased bythe tendency of some pyrophoric gases to "self protect", wherein bubblesor pockets of the pyrophoric gas develop which prevents reaction orneutralization of the pyrophoric gas in a controlled manner.

Pyrophoric gases are usually used for the deposition of various layersor for introducing dopants into the various layers of a semiconductordevice. For example, silane (SiH₄) may be used along with oxygen to forma silicon dioxide (SiO₂) layer in a chemical vapor deposition (CVD)system. Diborane (B₂ H₄), phosphine (PH₃), and arsine (AsH₃) may be usedto add dopants to a layer. Silane also is used to form polycrystallinesilicon layers as well as epitaxial, single crystal silicon in a varietyof processes. Other commonly used pyrophoric gases include halogenatedcompounds such as dichlorosilane (SiH₂ Cl₂), among others. Generally,the processes which use these pyrophorics, such as a CVD depositionprocess in a CVD system, utilize a flow of the reactant gases throughthe reactor chamber. Normally, not all of the pyrophorics are spent inthe process, and any remaining pyrophorics must be exhausted or pumpedout of the reactor. This spent process gas must then be neutralized in acontrolled manner so that it is not released into the atmosphere whereit may cause a fire or an explosion upon contact with air. In additionto spent process gas, semiconductor manufacturing operations may haveother sources of pyrophoric gas which must be neutralized. For example,the pyrophoric gas pump or pipe panel may be purged with nitrogen, andthe exhaust line for the pump or panel must then be neutralized.

In the prior art, several systems exist for neutralizing a gas streamcontaining one or more pyrophoric gases. Many of these systems are"active" in that they provide a flame and reaction chamber through whichthe pyrophoric, as well as flammable and/or toxic gases in the spentgas, pass. The flame ensures combustion of nearly all pyrophoric gas,thus virtually eliminating the possibility of a sufficient accumulationof the pyrophoric gas to cause an explosion. To ensure a constant flame,a fuel source, such as hydrogen (H₂) or natural gas (CH₄) is ignited by,for example, spark plugs. Example of such systems include "TheSergeant", manufactured by Custom Engineered Material, Inc. and "TheGuardian", manufactured by Hoechst Celanese Corp. These systems areoften referred to in the art as "burn boxes."

Another prior art system is a dilution system. In a dilution system, thegas stream containing the pyrophoric gas is first diluted in an inertgas such as nitrogen (N₂) in a ratio of approximately 100:1 (inert:spentprocess gas) by volume. This diluted gas stream is then combined withair in a reaction tube to allow the pyrophoric gas in the diluted gasstream to react with the oxygen in air. Because of the massive dilutionof the spent gas stream prior to exposure to air, there is littlepossibility of explosion.

The aforementioned prior art systems have several drawbacks. The activesystems are complex and expensive, requiring a large capital outlay. Thehigh cost is especially significant since most facilities requireseveral of these systems. In addition, the use of fuel such as H₂ ornatural gas adds additional ongoing operational expenses. Also, thesesystems require that the fuel source, which is a flammable gas, be pipedto each system installed, thereby incurring additional capital outlaysand presenting an additional fire hazard. The dilution type systems,while not as complex as the active system, are expensive to operate dueto the large volume of inert gas used. Also, the dilution systems willnot ensure complete reaction due to possible streamlining of thepyrophoric gas in the event of a sudden release, resulting in apotential for explosion.

What is needed is a system which can efficiently neutralize pyrophoricgas. The system should ensure complete or nearly complete neutralizationof any pyrophoric gas contained in the gas stream to be neutralized. Itis desirable that such a system be simple and inexpensive to build andoperate. It is further desirable that the system does not require a fuelsource to operate. Finally, such a system should be capable of handlinga spent process stream that varies in pyrophoric gas concentrations fromtrace amounts up to several ten of liters per minute.

SUMMARY OF THE INVENTION

A method and apparatus for neutralizing a pyrophoric gas is described.The pyrophoric gas may be contained in a stream of spent process gasesfrom, for example, a CVD reactor in a semiconductor manufacturingfacility.

A chamber is provided where the gas stream containing the pyrophoric iscombined with a turbulent flow of air. The turbulent flow ensurescomplete mixing of the air and pyrophoric gas, thereby preventing thepossibility of an explosion due to a bubble or pocket of pyrophoric gas.Also, this complete mixing ensures that all or nearly all of thepyrophoric gas is neutralized by reacting with the oxygen in the air.

The turbulent flow is provided by a plurality of 90 degree turns thatthe flow must take in the neutralization chamber. Also, the inlet nozzlefor the air introduces turbulence into the flow. Finally, baffles orimpact plates may be placed within the chamber to ensure a turbulentflow.

The disclosed invention is an inactive system in that the flame is notintentionally created and no fuel source or ignition means is used. Atlow concentrations of pyrophoric gas, the gas is neutralized without aflame. At high flows of pyrophoric gas, a flame often results from thespontaneous reaction of the pyrophoric gas with air.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional elevation view of the present invention.

FIG. 2 is a top view of the present invention.

FIG. 3 is an end view of the present invention.

FIG. 4 is a side panel of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

A novel process is described for neutralizing pyrophoric gases used inthe manufacture of semiconductor devices. In the following description,numerous specific details are set forth such as specific dimensions, gasflows, air flows, materials, etc. in order to provide a thoroughunderstanding of the present invention. It will be obvious, however, toone skilled in the art, that the present invention may be practicedwithout these specific details. In other instances, well known methodshave not been described in detail in order to avoid unnecessarilyobscuring the present invention.

Referring to FIG. 1, a cross-sectional side view of the currentlypreferred embodiment of pyrophoric gas neutralization chamber 10 isshown. Chamber 10 includes air inlet 11, gas inlet 12, exhaust port 13,and, optionally, baffles 14. In the currently preferred embodiment,chamber 10 is a 3-tier chamber, having two 180° turns in the air flowdirection. Also in the currently preferred embodiment, the length 16 ofeach segment is in the range of approximately 2-3 feet and, each tier isof equal height 17 which is in the range of approximately 4-6 inches.

FIG. 2 shows a top view of chamber 10. The width 18 of chamber 10 is inthe range of approximately 6-12 inches in the currently preferredembodiment. Segment 15, which contains air inlet 11 and gas inlet 12,has a length 19 extending beyond the length 16 of chamber 10 ofapproximately 6 inches in the currently preferred embodiment. Segment 15has a height equal to the height 17 of each tier of chamber 10 and thesame width 18 as the remainder of chamber 10. As can be best seen inFIG. 1, air inlet 11 has triangular members 11a which create aventuri-lik inlet for incoming air.

It will be appreciated that the above dimensions can be varied within acertain range. The main concern is to maintain a turbulent flow of airand pyrophoric gas throughout a sufficient length of chamber 10 toensure complete mixing of the air and pyrophoric gas so that all ornearly all of the pyrophoric gas is neutralized. For example, in thecurrently preferred embodiment, baffles 14 are not utilized because ithas been found for the dimensions given above, sufficient turbulence iscreated by the S-curve construction, together with the turbulencecreated by air inlet 11. Thus, numerous other configurations arepossible provided sufficient turbulence is created and maintained. Forexample, a plurality of baffles 14 could be added, or the shape ofbaffles 14 could be modified. For example, a curved baffle or "L" shapedbaffle could be used. Additionally, it is possible a 2-tier or singletier chamber could be used so long as there are means such as bafflesand an inlet configuration which promotes turbulence. However, anadvantage of a multi-tiered chamber, in addition to the turbulencecreated by the 180° changes in flow direction, is that increased traveltime through the chamber is provided for with a reduced footprint. Also,in a multi-tiered configuration such as that currently used, the heightof all tiers does not necessarily need to be equal but can be variedsomewhat, so long as a turbulent flow, which ensures complete mixing ofthe gas and air streams to create a controlled reaction between thepyrophoric gas and air, is maintained.

As can be seen from FIG. 2, a plurality of gas inlets 12, shown as inlet12a and 12b, can be present in chamber 10. Each of gas inlets 12a and12b could be connected to, for example, a line coupled to the vacuumpump exhaust from a CVD reactor. Inlets 12 thus receive the spentprocess gas from the CVD reactor. A chamber 10 having dimensions at thelow end of the ranges given above can accommodate one gas inlet 12,while a chamber 10 having dimensions at the high end of the ranges givenabove can accommodate up to three gas inlets 12.

FIG. 3 shows an end view of chamber 10. As can be seen in the figure,air inlet 11 is rectangular in shape. In the currently preferredembodiment, air inlet 11 is approximately 4 inches long by 2.5 incheshigh.

In the currently preferred embodiment, chamber 10 is constructed of 14gauge (0.075 inch) 316 stainless steel. Some portions, such as thebaffles 14 and stand-offs (not shown) are made of, for example, 1/4 inch316 stainless steel.

The exact dimensions of chamber 10 and amount of air flow through airinlet 11 will depend upon the flow of pyrophoric gas through gas inlets12. The pyrophoric gas flow is shown by arrow 51 in FIG. 1. In normaloperation, each gas inlet 12 is connected to, for example, the pumpexhaust from a CVD reactor as described above. A typical CVD exhaustwill have some amount of one or more pyrophoric gases, such as, forexample, silane, dichlorosilane (SiH₂ Cl₂), trichlorosilane (SiHCl₃),any of the previously mentioned pyrophoric gases, or others. As used inthis specification, the term "pyrophoric gas" indicates that one or morepyrophoric gases are present, and use of the term "pyrophoric gas" inthe following discussion is not meant to imply that only a singlespecies of pyrophoric gas is present. In addition, one or more flammablegases, such as H₂, as well as one or more inert gases, such as N₂, maybe present. The exact composition of the spent gas stream 51 will dependupon the particular process and equipment.

Typically, the flow of, for example, silane in the spent gas stream 51will be in the range of approximately 50-1000 cubic centimeters perminute (ccm). However, under worst case conditions, for example, whenthe process is shut down and by-passed, considerably more silane may bepresent. Under worst case conditions, for a typical semiconductormanufacturing facility utilizing standard pressurized supply cylindersand piping, the silane flow may be as high as 30,000 ccm or 30 litersper minute (1 pm). Thus, the neutralization chamber 10 must be able toneutralize a process gas stream containing anywhere in the range ofapproximately 50-30,000 ccm of pyrophoric gas safely.

In operating the neutralization chamber 10, a great excess of air isused to ensure turbulent flow. The amount of air necessary to achieve aturbulent flow results in a greater than stoichiometric ratio of oxygento pyrophoric gas. The proper air flow for a given set of dimensions ofchamber 10 has been determined experimentally, as will be describedlater. For example, it has been determined experimentally forneutralizing silane that for a chamber 10 with a length 16 of 2 feet,width 18 of 6 inches, and 3 tiers each having a height 17 of 4 inches,and a single gas inlet 12, an air flow in the range of approximately75-100 cubic feet per minute (cfm) is sufficient (1 cfm=28.3 lpm). Foran intermediate sized chamber 10 having a length 16 of 2 feet, 8 inches,width 18 of 8 inches and per tier height 17 of 4 inches, and two gasinlets 12, an air flow in the range of approximately 125-150 cfm issufficient. Finally, for a chamber 10 having a length 16 of 2 feet, 8inches, width 18 of 1 foot, and per tier height 17 of 6 inches, andthree gas inlets 12, an air flow in the range of approximately 175-200cfm is sufficient. For the preferred configuration described herein, ithas been determined experimentally that the minimum air flow should beabout 70 times the expected maximum silane flow rate. The maximum airflow rate is determined by the minimum residence time necessary for thepyrophoric gas to react. For silane, it has been determinedexperimentally that a residence time of at least approximately 1/2second is necessary.

In the currently preferred embodiment, exhaust port 13 is connected toan exhaust fan (not shown). In order to regulate the air flow throughchamber 10 when the exhaust port 13 of chamber 10 is connected to a fanhaving a relatively constant air pull, the size of air inlet 11 can bevaried. In order to determine the proper size of inlet 11 to achieve thedesired air flow rate for a given chamber 10, an inlet 11 covered by aslide mechanism can be utilized to allow for varying the flow rate forexperimentation. Alternatively, a fan can be connected to air inlet 11to push the required air through chamber 10.

In an alternative embodiment, the spent gas stream 51 from more than onepiece of equipment can be first combined and then introduced intochamber 10 through a single gas inlet 12. However, this can only be donewhen there is no possibility that either of the streams contain anoxidant, as an explosion may result. As a further alternativeembodiment, an oxidant other than air could be used, for example, oxygenor nitrous oxide (N₂ O) would work in place of air, but would obviouslybe much more expensive. Alternatively, an oxidizing species such as O₂or N₂ O can be added in addition to air at any point in the flow ofchamber 10. Also, greater quantities of pyrophoric gas can beneutralized so long as a turbulent flow and sufficient residence timethrough chamber 10 is maintained.

In the operation of chamber 10 in neutralizing silane, it has been foundthat at a silane flow under 600 ccm no flame is generated in chamber 10.At a silane flow of approximately 600 ccm or greater, a flame isgenerated by the silane neutralization. Silane concentration has beenmeasured at the exhaust port 13 under a variety of conditions. In thecases where a flame is generated, no silane could be detected in theexhaust stream 52 exiting exhaust port 13. At low silane flow rates, forexample, 50 ccm silane in 20 lpm nitrogen entering chamber 10 throughgas inlet 12 (i.e. 2,500 ppm silane incoming), the average silaneconcentration measured at exhaust port 13 was in the range ofapproximately 0-3 ppm and in no case exceeded 6 ppm. At these lowconcentrations, there is no risk of explosion and silane bubbleformation (i.e. silane self protection) does not occur.

It should also be noted that if flammable gases are present in the gasstream 51, the operation of chamber 10 in regard to pyrophoricneutralization will not be hindered. In cases where chamber 10 operateswithout a flame, the flammable gas will be unaffected. In flameoperations, the flammable gas will be largely consumed. As an additionalconsideration, if gas stream 51 contains a toxic or hazardous componentor if the pyrophoric gas in gas stream 51 reacts in chamber 10 to form atoxic by-product, then the toxic component will not necessarily beconsumed in chamber 10 and further processing of exhaust stream 52 (e.g.connection to a scrubber) may be necessary to eliminate the toxiccomponent(s).

In determining the optimum configuration of chamber 10, flow rates,inlet 11 shape, and position, number, shape, and location of any baffles14, a chamber 10 with a glass side panel was constructed. The glass sidepanel enabled viewing chamber 10 during operation from the sameperspective as is shown in FIG. 1. Smoke tests, wherein smoke is addedto the air flow, were then conducted to determine a configuration whichresults in a sufficiently turbulent flow. This method can be used toconstruct a neutralization chamber with a different shape and/or size asthat shown and described above. For example, such testing could be doneto construct a chamber for pyrophoric gas flow much greater than 30 lpmper inlet which is the maximum flow at which the embodiments describedabove were tested. In addition to the glass side panel, a slide overinlet 11, as described earlier, is useful for varying the air flowrates.

In the case of silane, one of the reaction products upon neutralizationis SiO₂. The SiO₂ is in the form of a brownish dust or very fine grainsand. In addition, spent process gas stream 51 may contain oil from theCVD reactor's vacuum pump. Because of these residues, the chamber 10requires occasional cleaning. In order to facilitate cleaning thechamber 10, one or more side panels, such as a panel which would coverthe side exposed in FIG. 1, can be made easily removable. Referring toFIG. 4, side panel 30 is attached by hinge members 31, so that it swingsout in the direction shown by the arrow. A handle 32 is provided inorder to open and shut the side panel. A plurality of wing-nut typescrews 33a-33f secures the edges of side panel 30 that are not securedby hinge members 31, to chamber 10 during use. As a further alternative,side panel 30 can be held in place by wing-nuts only. In this case,hinge members 31 are not used and additional wing-nuts 33g and 33h areused. The wing-nuts 33 screw into stand-offs located in chamber 10 (notshown in FIG. 1). When only wing-nuts 33a-33h are used, it is preferableto have an additional handle 36 to facilitate handling of the side panel30. Alternatively, in place of wing-nuts 33, side panel 30 can besecured by any type of latch-like apparatus that holds the side panelsecurely in place when latched and that can be quickly and easilyun-latched.

Thus, an inactive pyrophoric gas neutralization chamber has beendisclosed. The chamber is inexpensive to construct and economical tooperate since no fuel source is required. The chamber will neutralize,for example, silane over a wide range of input flows, so that theconcentration of silane in the exhaust is either non-detectable orwithin a range such that the risk of explosion is virtually eliminated.

We claim:
 1. An apparatus for neutralizing a pyrophoric gas comprising:achamber, said chamber having an exhaust port, said chamber having aninterior; first means for introducing a first flow of a first gasmixture, said first means having said first flow comprising an oxidizingspecies therein; second means for introducing a second flow of a secondgas mixture, said second means having said second flow comprising apyrophoric gas therein, wherein said first means and said second meansare positioned such that said first gas mixture and said second gasmixture do not combine prior to entering said chamber; and means forcreating turbulence, such that said first gas mixture and said secondgas mixture mix to form a third flow of gas comprising said first andsaid second gas mixtures, said third flow being turbulent through atleast a portion of said chamber, said third flow exiting said chamber atsaid exhaust port.
 2. The apparatus as described in claim 1 wherein saidfirst gas mixture is air and wherein said pyrophoric gas is selectedfrom the group consisting of SiH₄, SiH₃ Cl, SiH₂ Cl₂, SiHCl₃, B₂ H₆,PH₃, AsH₃, and a combination thereof.
 3. The apparatus as described inclaim 1 wherein said means for creating turbulence comprise at least one180 degree turn in a direction of flow of said third flow.
 4. Theapparatus as described in claim 2 wherein said means for creatingturbulence comprise at least one 180 degree turn in a direction of flowof said third flow.
 5. The apparatus as described in claim 1 whereinsaid means for creating turbulence comprise at least one baffle.
 6. Theapparatus as described in claim 3 wherein said means for creatingturbulence further comprise at least one baffle.
 7. The apparatus asdescribed in claim 1 wherein said apparatus does not include an ignitorand does not include a fuel source in addition to said pyrophoric gas.8. The apparatus as described in claim 2 wherein said apparatus does notinclude an ignitor and does not include a fuel source in addition tosaid pyrophobic gas.
 9. The apparatus as described in claim 3 whereinsaid apparatus does not include an ignitor and does not include a fuelsource in addition to said pyrophoric gas.
 10. The apparatus asdescribed in claim 1 wherein a sufficient amount of said pyrophoric gasis neutralized by a controlled reaction with said oxidizing species suchthat said third flow exiting said exhaust port has a substantiallyreduced risk of explosion.
 11. The apparatus as described in claim 2wherein a sufficient amount of said pyrophoric gas is neutralized by acontrolled reaction with said oxidizing species such that said thirdflow exiting said exhaust port has a substantially reduced risk ofexplosion.
 12. The apparatus as described in claim 3 wherein asufficient amount of said pyrophoric gas is neutralized by a controlledreaction with said oxidizing species such that said third flow exitingsaid exhaust port has a substantially reduced risk of explosion.
 13. Theapparatus as described in claim 1 wherein 0-30 liters per minute of saidpyrophoric gas flows in said first flow of said first gas mixture. 14.The apparatus as described in claim 2 wherein 0-30 liters per minute ofsaid pyrophoric gas flows in said first flow of said first gas mixture.15. The apparatus as described in claim 3 wherein 0-30 liters per minuteof said pyrophoric gas flows in said first flow of said first gasmixture.
 16. The apparatus as described in claim 1 wherein a side panelof said chamber is affixed to said chamber with a plurality of holdingmembers which hold said side panel securely in place during operationand which allow for removal of said side panel to expose said interiorof said chamber.
 17. The apparatus as described in claim 4 wherein aside panel of said chamber is affixed to said chamber with a pluralityof holding members which hold said side panel securely in place duringoperation and which allow for removal of said side panel to expose saidinterior of said chamber.
 18. The apparatus as described in claim 1wherein a side panel of said chamber is affixed to a side of saidchamber with a least one hinge, and said side panel is held in a closedposition by a plurality of holding members which hold said side panelsecurely in place during operation and which allow for said side panelto open about said at least one hinge to expose said interior of saidchamber.
 19. The apparatus as described in claim 4 wherein a side panelof said chamber is affixed to a side of said chamber with at least onehinge, and said side panel is held in a closed position by a pluralityof holding members which hold said side panel securely in place duringoperation and which allow for said side panel to open about said atleast one hinge to expose said interior of said chamber.
 20. Theapparatus as described in claim 1 wherein said means for creatingturbulence comprises said first flow, said first flow being sufficientto ensure that said first flow is turbulent.
 21. The apparatus asdescribed in claim 3 wherein said means for creating turbulence furthercomprises said first flow, said first flow being sufficient to ensurethat said first flow is turbulent.
 22. The apparatus as described inclaim 4 wherein said means for creating turbulence further comprisessaid first flow, said first flow being sufficient to ensure that saidfirst flow is turbulent.
 23. The apparatus as described in claim 5wherein said means for creating turbulence further comprises said firstflow, said first flow being sufficient to ensure that said first flow isturbulent.
 24. The apparatus as described in claim 6 wherein said meansfor creating turbulence further comprises said first flow, said firstflow being sufficient to ensure that said first flow is turbulent. 25.The apparatus as described in claim 7 wherein said means for creatingturbulence comprises said first flow, said first flow being sufficientto ensure that said first flow is turbulent.
 26. The apparatus asdescribed in claim 10 wherein said means for creating turbulencecomprises said first flow, said first flow being sufficient to ensurethat said first flow is turbulent.
 27. The apparatus as described inclaim 12 wherein said means for creating turbulence further comprisessaid first flow, said first flow being sufficient to ensure that saidfirst flow is turbulent.
 28. The apparatus as described in claim 16wherein said means for creating turbulence further comprises said firstflow, said first flow being sufficient to ensure that said first flow isturbulent.
 29. The apparatus as described in claim 17 wherein said meansfor creating turbulence further comprises said first flow, said firstflow being sufficient to ensure that said first flow is turbulent.